Zero AND Subsets
Given a multiset of non-negative integers a_1, a_2, ..., a_N.
How many non-empty subsets of this multiset have a bitwise AND value of 0?
Output the answer modulo 10^9+7.
Input
N
a_1 a_2...a_N
Output
Output the answer modulo 10^9+7.
Constraints
1 \leq N \leq 10^5 
0 \leq a_i \leq 2^{20}-1
Input Example
6
8 6 9 1 2 1
Output Example
51
