Abstract: We report 3-dimensional (3D) graphene-based biosensors fabricated via 3D transfer of monolithic graphene-graphite structures. This mechanically flexible all-carbon structure is a prospective candidate for intimate 3D interfacing with biological systems. Monolithic graphene-graphite structures were synthesized using low pressure chemical vapor deposition (LPCVD) process relying on the heterostructured metal catalyst layers. Nonplanar substrates and wet-transfer method were used with a thin Au film as a transfer layer to achieve the 3D graphene structure. Instead of the typical wet-etching method, vapor-phase etching was performed to minimize the delamination of the graphene while removing the transfer layer. We believe that the monolithic graphene-graphite synthesis combined with the conformal 3D transfer will pave the way for the 3D conformal sensing capability as well as the intracellular recording of living cells in the future.
External IDs:dblp:conf/embc/ChunCAN14
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