Autonomous Workflows and SHAP Interpretation of Deposition-Rates in Bipolar HiPIMS

Alexander Wieczorek, Nathan Rodkey, Jan Sommerhäuser, Jason Hattrick-Simpers, Manuel Kober-Czerny, Sebastian Siol

Submission Type: I want my submission to be considered for poster only

Keywords: Active Learning, Bayesian optimization, autonomous workflows, SHAP

TL;DR: Our proposed workflow combines autonomous experimentation and interpretable machine learning and is broadly applicable to the discovery and optimization of complex plasma processes.

Confirmation Of Submission Requirements: I submit an abstract. It uses the template provided on the submission page and is no longer than 2 pages.

Submission Number: 73