LithoExp: Explainable Two-stage CNN-based Lithographic Hotspot Detection with Layout Defect Localization

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Cong Jiang, Haoyang Sun, Dan Feng, Zhiyao Xie, Benjamin Tan, Kang Liu

Published: 2025, Last Modified: 07 Nov 2025ACM Trans. Design Autom. Electr. Syst. 2025EveryoneRevisionsBibTeXCC BY-SA 4.0