AI-Driven Optimization Framework for Next-Generation Semiconductor Manufacturing: From Digital Twins to Self-Optimizing Process

Shivin Srivastava, Ek Hong Lim, Pan Jieming, Jussi Keppo, Aaron Thean

Keywords: Smart Manufacturing, Artificial Intelligence, Atomic Layer Decomposition

TL;DR: This paper proposes a comprehensive artificial intelligence framework for optimizing semiconductor manufacturing processes, addressing the industry's pressing challenges of increasing complexity, yield variability, and resource efficiency.

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Submission Number: 112