Toggle navigation
OpenReview
.net
Login
×
Go to
TCAD 2023
homepage
Keeping Deep Lithography Simulators Updated: Global-Local Shape-Based Novelty Detection and Active Learning
Hao-Chiang Shao
,
Hsing-Lei Ping
,
Kuo-Shiuan Chen
,
Weng-Tai Su
,
Chia-Wen Lin
,
Shao-Yun Fang
,
Pin-Yian Tsai
,
Yan-Hsiu Liu
Mar 2023 (modified: 16 Apr 2023)
IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 2023
Readers:
Everyone
0 Replies
Loading