Semiconductor Equipment Health Monitoring With Multi-View Data

Jeongsun Ahn, Hong-Yeon Kim, Sang-Hyun Cho, Hyun-Jung Kim, Hongyeon Kim, Hyeonjeong Choi, Dain Ham

Abstract: Monitoring the state of semiconductor equipment is crucial for ensuring optimal performance and preventing downtime. In previous studies, researchers have attempted to derive a health index that represents the overall condition of the equipment as a single index. However, these studies have often relied solely on time-series data from each sensor, neglecting other important viewpoints engineers consider when monitoring the equipment. To address this limitation, we propose a multi-view data set specifically designed for semiconductor equipment, which incorporates process, trend, and spatial data. In addition, we present a framework for deriving a hierarchical health index based on a multi-view data set. The hierarchical structure is derived using a hierarchical spectral clustering method, and an autoencoder-based health index is used. We have verified the effectiveness of our approach with real data sets, demonstrating its potential as a valuable tool for monitoring the condition of semiconductor equipment.