Design of a graphene RF MEMS switch for X-V band

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Maoyun Zhang, Yanfei Liu, Jian Yu, Qiannan Wu, Mengwei Li

Published: 01 Jan 2023, Last Modified: 11 Apr 2025Microelectron. J. 2023EveryoneRevisionsBibTeXCC BY-SA 4.0
Abstract: Highlights•Design and optimization of graphene RF MEMS capacitive switches.•Using a graphene-gold composite beam as the upper electrode.•Optimized design of two types of actuation electrodes.•Drive voltage and switching time as low as 3 V and 300ns were achieved.•Achieve −47.46dB@8GHz isolation, −0.5dB@60GHz insertion loss excellent performance.