Development of neural networks integrated circuit driving electrostatic motors for microrobot

Hiroki Takayanagi, Runa Enosawa, Sumire Furuya, Katsuyuki Morishita, Ken Saito

Abstract: The authors are studying an insect-type microrobot using Micro-Electro-Mechanical Systems (MEMS) technology. The microrobot actuates by electrostatic motors that use electrostatic forces between electrodes. In the previous study, the waveform generator outputs the driving waveform of the electrostatic motor. Waveform generators are difficult to mount on microrobots due to their large size. Therefore, it is necessary to fabricate an integrated circuit capable of generating the driving waveform of the electrostatic motor to mount the driving circuit to the microrobot. This paper fabricated a Neural Networks Integrated Circuit (NNIC) as a driving circuit for an insect-type microrobot using an electrostatic motor. The NNIC generates pulse waveforms such as neural circuits of living organisms. As a measurement result, the constructed NNIC could generate the driving waveform of an electrostatic motor. Also, the NNIC could generate the anti-phase synchronization waveform that can actuate the insect-type microrobot by tripod gait. In addition, the electrostatic actuator was successfully operated using the generated waveforms.