Experimental platform and digital twin for AI-driven materials optimization and discovery for microelectronics using atomic layer depositionDownload PDF

Published: 22 Nov 2022, Last Modified: 05 May 2023AI4Mat 2022 SpotlightReaders: Everyone
Keywords: self-driving labs, atomic layer deposition, accelerated materials design, in-situ characterization, microelectronics, thin films
TL;DR: experimental setup and digital twin for a self-driving ALD tool, including an example of AI-driven process optimization providing a x100 acceleration in process development
Abstract: Atomic layer deposition (ALD) is a thin film growth technique that is key for both microelectronics and energy applications. Its step-by-step nature and its integration into fully automated clusters with wafer handling systems make is an ideal tool for AI-driven optimization and discovery. In this work we describe an experimental setup and digital twin of an ALD reactor coupled with in-situ characterization techniques that we have developed as a platform for the development and validation of novel algorithms for self-driving labs. Preliminary results show that it is possible to achieve a 100-fold reduction in the time required to optimize new processes. Finally we share some of the lessons learned during the design and validation of our self-driven thin film growth tool.
Paper Track: Behind the Scenes
Submission Category: AI-Guided Design, Automated Material Characterization
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