FEM Analysis and Parameter Optimization of a Linear Piezoelectric Motor Macro Driven

Tiemin Zhang, Fei Cao, Shenghua Li, Li Liang, Sheng Wen

Abstract: As the chip packaging industry developed rapidly, high requirements are put forward for positioning accuracy, speed and acceleration of the packaging equipment at the same time. However, the increase of positioning accuracy and the speed are in conflict. This article puts forward to the structure of a new cylindrical piezoelectric linear motor consisted of macro and micro actuate with the character of piezoelectric actuator, on the basis of the organic combination of piezoelectric motor and piezoelectric micro actuator. In addition, it analyzes the working principle of piezoelectric motor, builds finite element model of piezoelectric linear motor macroscopic actuate by using the finite element analysis software, does sensitivity analysis of the structural parameters and identifies the vibration modal automatically. Finally, it takes the symmetric and anti-symmetric modal frequency consistency of the compound vibrator as optimization objective function, redesigns the structure based on the optimization process, in order to reducing the difference frequency of symmetric and anti-symmetric vibration obviously, which can lay the foundation for designing piezoelectric linear motor consisted of macro and micro actuate.