Super-resolution optical metrology and imaging of 3D nano-scale objects

Jin-Kyu So, Eng Aik Chan, Giorgio Adamo, Nikolay I. Zheludev

Keywords: optical metrology, super-resolution, machine learning

TL;DR: We show experimentally that a deep learning-enabled analysis of intensity diffraction patterns allows 3D metrology of subwavelength objects with precision reaching λ/467 (1.4 nm).

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Submission Number: 237