SRAF Insertion via Supervised Dictionary Learning

Hao Geng, Wei Zhong, Haoyu Yang, Yuzhe Ma, Joydeep Mitra, Bei Yu

Abstract: In modern VLSI design flow, subresolution assist feature (SRAF) insertion is one of the resolution enhancement techniques (RETs) to improve chip manufacturing yield. With aggressive feature size continuously scaling down, layout feature learning becomes extremely critical. In this article, for the first time, we enhance conventional manual feature construction, by proposing a supervised online dictionary learning algorithm for simultaneous feature extraction and dimensionality reduction. By taking advantage of label information, the proposed dictionary learning framework can discriminatively and accurately represent the input data. We further consider SRAF design rules in a global view, and design two integer linear programming models in the post-processing stage of SRAF insertion framework. The experimental results demonstrate that, compared with a state-of-the-art SRAF insertion tool, our framework not only boosts the performance of the machine learning model but also improves the mask optimization quality in terms of edge placement error (EPE) and process variation (PV) band area.