Language Driven Analytics for Failure Pattern Feedforward and Feedback

Min Jian Yang, Yueling Zeng, Li-C. Wang

Abstract: In the context of analyzing wafer maps, we present a novel approach to enable analytics to be driven by user queries. The analytic context includes two aspects: (1) grouping wafer maps based on their failure patterns and (2) for a failure pattern found at wafer probe, checking to see whether there is a correlation to the result from the final test (feedforward) and to the result from the E-test (feedback). We introduce language driven analytics and show how a formal language model in the backend can enable natural language queries in the frontend. The approach is applied to analyze test data from a recent product line, with interesting findings highlighted to explain the approach and its use.