Inverse-Designed Dual Layer c-Si/SiN Vertical Grating Couplers Tested on 300mm Wafers

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Sean Hooten, Mudit Jain, Thomas Van Vaerenbergh, Peng Sun, Quentin Wilmart, M. Ashkan Seyedi, Zhihong Huang, Marco Fiorentino, Raymond G. Beausoleil

Published: 01 Jan 2022, Last Modified: 05 May 2025OECC/PSC 2022EveryoneRevisionsBibTeXCC BY-SA 4.0
Abstract: We experimentally demonstrate record low median insertion loss (1.3 dB, O-band) in 0° single-polarization grating couplers consisting of a single-etch c-Si layer with a patterned SiN overlay, fabricated with 193nm DUV immersion lithography on 300mm wafers.