In-depth investigation of metallization aging in power MOSFETs

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R. Ruffilli, Mounira Berkani, Philippe Dupuy, Stéphane Lefebvre, Y. Weber, Marc Legros

Published: 01 Jan 2015, Last Modified: 15 May 2025Microelectron. Reliab. 2015EveryoneRevisionsBibTeXCC BY-SA 4.0
Abstract: Highlights•Evolution of the microstructure of a MOSFET Al-based metallization during aging•Evolution of wire bonding/metallization interface and structure before and after aging•Grain orientation mapping using two different techniques•Aging mechanism through diffusion based crack propagation revealed