Noise Suppression and Disturbance Rejection Control for Piezo-Actuated Nanopositioning Stages

Xinyu Wang, Jianying Zheng, Dongyu Li, Fei Dong, Jianpeng Zhong, Qinglei Hu

Abstract: This work proposes a noise suppression and disturbance rejection control (NSDRC) strategy for piezo-actuated nanopositioning stages to achieve high bandwidth, strong ro-bustness, and noise suppression. In NSDRC, a noise reduction disturbance observer (NRDO) is designed based on the identified third-order model. Then, the design procedure of the tracking controller is analyzed in the error domain. A full-loop optimization scheme is developed to improve the performance. Finally, the effectiveness of NSDRC is verified by simulation in time domain and frequency domain, respectively. The results show that NSDRC has significant advantages over the classical control methods, including integral resonant control (IRC), positive acceleration, velocity and position feedback (PAVPF) and hierarchical anti-disturbance control (HADC) in terms of bandwidth and robustness. Compared with IRC and HADC, NSDRC also provides a better balance between noise suppression, bandwidth and robustness.