Wafer Map Pattern Analytics Driven By Natural Language Queries

Yueling Jenny Zeng, Min Jian Yang, Li-C. Wang

Abstract: We present a novel approach where wafer map pattern analytics are driven by natural language queries. At the core is a semantic parser that translates a user query into a meaning representation comprising instructions to generate a summary plot. The allowable plot types are pre-defined which serve as an interface that communicates user intents to the analytics software backend. Application results on wafer maps from a recent production line are presented to explain the capabilities and benefits of the proposed approach.