Total Deep Variation for Noisy Exit Wave Reconstruction in Transmission Electron Microscopy

Thomas Pinetz, Erich Kobler, Christian Doberstein, Benjamin Berkels, Alexander Effland

Abstract: Transmission electron microscopes (TEMs) are ubiquitous devices for high-resolution imaging on an atomic level. A key problem related to TEMs is the reconstruction of the exit wave, which is the electron signal at the exit plane of the examined specimen. Frequently, this reconstruction is cast as an ill-posed nonlinear inverse problem. In this work, we integrate the data-driven total deep variation regularizer to reconstruct the exit wave in this inverse problem. In several numerical experiments, the applicability of the proposed method is demonstrated for different materials.