Reliability and Accelerated Testing of 14nm FinFET Ring Oscillators

Shu-Han Hsu, Kexin Yang, Linda Milor

Abstract: Accelerated lifetime tests are necessary for reliability evaluation of circuits and systems, but the parameters for choosing the test conditions are often unknown. Furthermore, reliability testing is generally performed on test structures that have different properties than actual circuits and systems, which may create inconsistencies in how circuits and systems work in reality. To combat this problem, we use ring oscillators, which are similar to circuits, based on the 14nm FinFET node as the circuit vehicle to extract wearout data. We explore the effects of testing time, sample size, and number of stages on the ability to detect failures for various test conditions, focusing on front-end time dependent dielectric breakdown, which is one of the most dominant wearout mechanisms.