A depthwise convolutional neural network model based on active contour for multi-defect wafer map pattern classification

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Jeonghoon Choi, Dongjun Suh

Published: 2025, Last Modified: 05 Nov 2025Eng. Appl. Artif. Intell. 2025EveryoneRevisionsBibTeXCC BY-SA 4.0
Abstract: Highlights•Multi-defect semiconductor wafer map pattern classification.•Active contour segmentation for wafer map pattern extraction.•Proposed method being precise in multi-defect wafer map pattern classification.•Proposed method providing both lightweight characteristics and high accuracy.