A Robust Computational Algorithm for Inverse Photomask Synthesis in Optical Projection Lithography

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Siu-Kai Choy, Ningning Jia, Chong-Sze Tong, Man-Lai Tang, Edmund Y. Lam

Published: 01 Jan 2012, Last Modified: 06 Feb 2025SIAM J. Imaging Sci. 2012EveryoneRevisionsBibTeXCC BY-SA 4.0